Influence of vibrational kinetics in a low pressure capacitively coupled hydrog...

• Author(s): Marques, L. ; Salabas, A. ; Gousset, G. ; Alves, L. L.
• Date: 2003
• Persistent ID: http://hdl.handle.net/1822/4385
• Origin: RepositóriUM - Universidade do Minho
• Subject(s): Modelling; RF; Vibrational; Hydrogen; Plasma
• Document Type: Article
• Language: English

Description

In this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the discharge about 40% when comparing with previous estimates using a simplified kinetics.