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Systematic characterization of low-pressure capacitively coupled hydrogen disch...
Marques, L.; Salabas, A.; Jolly, Jacques; Gousset, G.; Alves, L. L.The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, produced in a parallel plate cylindrical setup. A two-dimensional, time-dependent fluid model is used to describe the production, transport, and destruction of electrons and positive ions H+,H2+, and H3+, at different frequencies(13.56 - 60 MHz), pressures (0.2 - 8 Torr), rf applied voltages (50 - 450 V) and geome...
Influence of vibrational kinetics in a low pressure capacitively coupled hydrog...
Marques, L.; Salabas, A.; Gousset, G.; Alves, L. L.In this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the dischar...
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