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Double sheaths in RF discharges

Marques, L.; Gousset, G.; Alves, L. L.

This paper analyzes the formation of double spacecharge sheaths, associated to the development of double ionization structures in radio frequency discharges. A simulation tool is used to generate space-time images of the ionization rate in hydrogen and in helium, obtained by inducing artificial modifications in the mobility of charged particles, with these gases


2D fluid approaches of DC magnetron discharge

Costin, C.; Marques, L.; Popa, G.; Gousset, G.

A two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of Boltzmann equation: continuity, momentum transfer and mean energy transfer (the latter one only for electrons), coupled with Poisson equation. An original way is proposed to ...


Capacitively coupled hydrogen discharges : modeling vs. experiment

Marques, L.; Jolly, Jacques; Gousset, G.; Alves, L. L.

This paper presents a systematic characterization of hydrogen capacitively coupled very high frequency discharges, produced within a parallel plate cylindrical setup, by comparing numerical simulations to experimental measurements for various plasma parameters. A good quantitative agreement is found between calculation and experiment for the coupled electrical power and the plasma potential, at various frequenc...


Systematic characterization of low-pressure capacitively coupled hydrogen disch...

Marques, L.; Salabas, A.; Jolly, Jacques; Gousset, G.; Alves, L. L.

The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, produced in a parallel plate cylindrical setup. A two-dimensional, time-dependent fluid model is used to describe the production, transport, and destruction of electrons and positive ions H+,H2+, and H3+, at different frequencies(13.56 - 60 MHz), pressures (0.2 - 8 Torr), rf applied voltages (50 - 450 V) and geome...


Modelling and characterization of a low pressure capacitively coupled hydrogen ...

Marques, L.; Jolly, J.; Gousset, G.; Alves, L. L.

This paper presents a systematic characterization of a pure hydrogen capacitively coupled radio frequency discharge, produced in a parallel plate cylindrical setup, comparing experimental measurements obtained for such discharge with numerical simulations. A good agreement is found between simulation results and experimental measurements for the discharge main electrical parameters. A comparison of H atom absol...


Influence of vibrational kinetics in a low pressure capacitively coupled hydrog...

Marques, L.; Salabas, A.; Gousset, G.; Alves, L. L.

In this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the dischar...


DC magnetron discharge fluid model using a new numerical scheme

Costin, C.; Marques, L.; Gousset, G.; Popa, G.

Numerical modelling of an electrical discharge by fluid model can be accomplished through different procedures and approaches. A 2D time-dependent one was applied in order to describe a cylindrical symmetry Argon DC planar magnetron discharge. All transport equations, which means continuity and momentum transfer equations for electrons and ions and electron mean energy transport equation are solved in the same ...


Modelling the influence of frequency in a low pressure capacitively coupled hyd...

Marques, L.; Jolly, Jacques; Gousset, G.; Alves, L. L.

This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequency


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