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Experiments and modelling in N2-H2 capacitively coupled radio-frequency discha...
Marques, L.; Mahjoub, A.; Pintassilgo, C. D.; Carrasco, N.; Cernogora, G.; Alves, L. L.This work uses experiments and simulations to analyze the modifications induced in pure N2 capacitively coupled radio-frequency discharges, running at low pressure (0.6–1.2 mbar) and low power (5–20 W), by the addition of small amounts of H2 (up to 5%). Simulations use a hybrid code coupling a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles, to a zero-dimensional ki...
Capacitively coupled radio-frequency N2 discharges at low pressures
Marques, L.; Alves, L. L.; Pintassilgo, C. D.; Carrasco, N.; Boufendi, L.; Cernogora, G.Capacitively coupled radio-frequency discharges (ccrf) in nitrogen mixtures are frequently used for the processing, modification and functionalization of different kinds of materials. Although nitrogen plasmas have been studied for many years, and despite their growing interest in applications, there is only partial knowledge about ccrf nitrogen plasmas. This paper uses experiments and modelling to study ccrf d...
Capacitively coupled rf coupled plasmas in N2-H2 mixtures
Mahjoub, A.; Gouveia, A.; Carrasco, N.; Pintassilgo, C. D.; Marques, L.; Ramos, Marta M. D.; Alves, L. L.; Cernogora, G.This paper studies the modifications induced in low-pressure radio-frequency (rf) capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The work is an intermediate step towards the study of N2-CH4 plasmas, for the simulation of the ionospheric chemistry of Saturn's satellite Titan. The plasmas are studied using both experiments and simulations. The experimental setup is...
Fluid modelling of capacitively coupled radio-frequency discharges : a review
Alves, L. L.; Marques, L.Capacitively coupled radio-frequency (ccrf) discharges are still among the most powerful and flexible plasma reactors, widely used both in research and in industry. The continuous investment in studying these discharges is therefore well justified, not only to understand the phenomena describing their operation but also to project modified versions of ccrf-reactors. This paper reviews the basis and the success...
RF capacitively coupled plasmas in N2-H2 mixtures
Mahjoub, A.; Gouveia, A.; Carrasco, N.; Pintassilgo, C. D.; Marques, L.; Ramos, Marta M. D.; Alves, L. L.; Cernogora, G.Comunicação em Poster ; This paper studies the modifications induced in low-pressure radio-frequency capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The plasmas are studied using both experiments (electrical and optical emission spectroscopy measurements) and simulations (using a fluid+kinetic code). Results reveal that the electron density increases with the amou...
Experimental characterization of capacitively coupled radio-frequency discharge...
Gouveia, A.; Mahjoub, A.; Carrasco, N.; Marques, L.; Alves, L. L.; Cernogora, G.; Pintassilgo, C. D.We have performed extensive measurements in capacitively coupled radio-frequency discharges, producing N2-CH4 plasmas for methane concentrations between 0% and 10%. These dusty plasmas are well characterized by monitoring the evolution, with the methane concentration, of the electron density, the self-bias voltage, the coupled power, and the spectral line intensity of a number of optical transitions. The plasma...
Capacitively coupled radio-frequency discharges in nitrogen at low pressures
Alves, L. L.; Marques, L.; Pintassilgo, C. D.; Wattieaux, G.; Es-Sebbar, E. T.; Berndt, J.; Kovacevic, E.; Carrasco, N.; Boufendi, L.; Cernogora, G.This paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56MHz frequency, 0.1–1 mbar pressures and 2–30W coupled powers. Experiments performed on two similar (not twin) setups, existing in the LATMOS and the GREMI laboratories, include electrical and optical emission spectroscopy (OES) measurements. Electrical measurements give the rf-applie...
Fluid modelling of capacitively coupled radio-frequency discharges : a review
Alves, L. L.; Marques, L.This paper reviews the basis and the successes with the fluid modelling of capacitively coupled radio-frequency discharges, produced within a parallel-plate cylindrical setup at (single) 13.56–80MHz frequencies, 6x10−2–6 Torr pressures and 50–1000V rf-applied voltages, in SiH4-H2, H2 and N2. The two-dimensional, time-dependent model used in the simulations accounts for the production, transport and destruction ...
Modeling of capacitively coupled radio-frequency discharges in N2-H2 mixtures
Sousa, Ricardo E.; Alves, L. L.; Pintassilgo, C. D.; Ramos, Marta M. D.; Marques, L.Apresentação em poster ; Capacitively coupled radio-frequency (ccrf) discharges in N2-H2 mixtures are becoming increasingly popular. Discharges operated in mixtures of hydrogen and nitrogen are nowadays used as a source of active species for various kinds of applications from etching of low-k materials to modifications of polymer surfaces for biomedical applications. Moreover, these discharges are also being u...
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure
Alves, L. L.; Marques, L.; Pintassilgo, C. D.; Wattieaux, G.; Berndt, J.; Boufendi, L.; Es-Sebbar, E. T.; Carrasco, N.; Cernogora, G.Apresentação em poster; publicado em: Bulletin of the American Physical Society. 56:15 (2011). ; This paper studies capacitively coupled radio-frequency discharges (13.56MHz frequency) in pure nitrogen, produced within the LATMOS and the GREMI cylindrical parallel-plate reactors, surrounded by a lateral grounded grid, at 2-30W coupled powers and 0.2-1 mbar pressures. Simulations use an hybrid code [1] that cou...
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