Modelling the influence of frequency in a low pressure capacitively coupled hyd...

• Author(s): Marques, L. ; Jolly, Jacques ; Gousset, G. ; Alves, L. L.
• Date: 2002
• Persistent ID: http://hdl.handle.net/1822/3016
• Origin: RepositóriUM - Universidade do Minho
• Subject(s): Capacitively coupled discharge; Hydrogen plasma
• Document Type: Article
• Language: English

Description

This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequency