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Capacitively coupled radio-frequency hydrogen discharges : the role of kinetics
Marques, L.; Jolly, Jacques; Alves, L. L.This paper presents a systematic characterization of capacitively coupled radio-frequency hydrogen, discharges, produced within a parallel plate cylindrical setup at different rf applied voltages (Vrf=50–600 V), frequencies (f =13.56–40.68 MHz), and pressures (p=0.2–1 torr). A two-dimensional, time-dependent fluid model for charged particle transport is self-consistently solved coupled to a homogeneous kinetic ...
Electrical characterization of capacitively-coupled radio-frequency discharges ...
Marques, L.; Jolly, Jacques; Alves, L. L.This work presents modeling and experimental results for the electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen. A two-dimensional, time-dependent fluid model is used to describe the dynamics of electrons and positive ions H+, H2+, and H3+at different frequencies (13.56–80 MHz), pressures (0.2–1 Torr), and rf applied voltages (50–800 V). The current-voltage relationship i...
Capacitively coupled hydrogen discharges : modeling vs. experiment
Marques, L.; Jolly, Jacques; Gousset, G.; Alves, L. L.This paper presents a systematic characterization of hydrogen capacitively coupled very high frequency discharges, produced within a parallel plate cylindrical setup, by comparing numerical simulations to experimental measurements for various plasma parameters. A good quantitative agreement is found between calculation and experiment for the coupled electrical power and the plasma potential, at various frequenc...
Systematic characterization of low-pressure capacitively coupled hydrogen disch...
Marques, L.; Salabas, A.; Jolly, Jacques; Gousset, G.; Alves, L. L.The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, produced in a parallel plate cylindrical setup. A two-dimensional, time-dependent fluid model is used to describe the production, transport, and destruction of electrons and positive ions H+,H2+, and H3+, at different frequencies(13.56 - 60 MHz), pressures (0.2 - 8 Torr), rf applied voltages (50 - 450 V) and geome...
Modelling the influence of frequency in a low pressure capacitively coupled hyd...
Marques, L.; Jolly, Jacques; Gousset, G.; Alves, L. L.This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequency
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