Modelling the influence of frequency in a low pressure capacitively coupled hyd...

• Autor(es): Marques, L. ; Jolly, Jacques ; Gousset, G. ; Alves, L. L.
• Data: 2002
• Identificador Persistente: http://hdl.handle.net/1822/3016
• Origem: RepositóriUM - Universidade do Minho
• Assunto(s): Capacitively coupled discharge; Hydrogen plasma
• Tipo de Documento: Artigo
• Idioma: Inglês

Descrição

This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequency