Experimental characterization of capacitively coupled radio-frequency discharge...

• Author(s): Gouveia, A. ; Mahjoub, A. ; Carrasco, N. ; Marques, L. ; Alves, L. L. ; Cernogora, G. ; Pintassilgo, C. D.
• Date: 2012
• Persistent ID: http://hdl.handle.net/1822/20164
• Origin: RepositóriUM - Universidade do Minho
• Document Type: Conference Object
• Language: English

Description

We have performed extensive measurements in capacitively coupled radio-frequency discharges, producing N2-CH4 plasmas for methane concentrations between 0% and 10%. These dusty plasmas are well characterized by monitoring the evolution, with the methane concentration, of the electron density, the self-bias voltage, the coupled power, and the spectral line intensity of a number of optical transitions. The plasma properties exhibit drastic changes that are found correlated with the dust production regime.