This work uses experiments and simulations to analyze the modifications induced in pure N2 capacitively coupled radio-frequency discharges, running at low pressure (0.6–1.2 mbar) and low power (5–20 W), by the addition of small amounts of H2 (up to 5%). Simulations use a hybrid code coupling a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles, to a zero-dimensional ki...
This paper studies the modifications induced in low-pressure radio-frequency (rf) capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The work is an intermediate step towards the study of N2-CH4 plasmas, for the simulation of the ionospheric chemistry of Saturn's satellite Titan. The plasmas are studied using both experiments and simulations. The experimental setup is...
Comunicação em Poster ; This paper studies the modifications induced in low-pressure radio-frequency capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The plasmas are studied using both experiments (electrical and optical emission spectroscopy measurements) and simulations (using a fluid+kinetic code). Results reveal that the electron density increases with the amou...
We have performed extensive measurements in capacitively coupled radio-frequency discharges, producing N2-CH4 plasmas for methane concentrations between 0% and 10%. These dusty plasmas are well characterized by monitoring the evolution, with the methane concentration, of the electron density, the self-bias voltage, the coupled power, and the spectral line intensity of a number of optical transitions. The plasma...
Apresentação em poster ; The present work involves the study of Capacitively Coupled Plasmas (CCPs) produced at 13.56 MHz radio-frequency (RF) and 0.2 to 1.2 mbar pressures. The main characteristics of the CCP source, which is described with more detail in reference [1], are the following: (i) the discharge is confined laterally by a grounded cylindrical metallic grid; (ii) the gas is continuously injected int...
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