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Experiments and modelling in N2-H2 capacitively coupled radio-frequency discha...

Marques, L.; Mahjoub, A.; Pintassilgo, C. D.; Carrasco, N.; Cernogora, G.; Alves, L. L.

This work uses experiments and simulations to analyze the modifications induced in pure N2 capacitively coupled radio-frequency discharges, running at low pressure (0.6–1.2 mbar) and low power (5–20 W), by the addition of small amounts of H2 (up to 5%). Simulations use a hybrid code coupling a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles, to a zero-dimensional ki...


Capacitively coupled rf coupled plasmas in N2-H2 mixtures

Mahjoub, A.; Gouveia, A.; Carrasco, N.; Pintassilgo, C. D.; Marques, L.; Ramos, Marta M. D.; Alves, L. L.; Cernogora, G.

This paper studies the modifications induced in low-pressure radio-frequency (rf) capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The work is an intermediate step towards the study of N2-CH4 plasmas, for the simulation of the ionospheric chemistry of Saturn's satellite Titan. The plasmas are studied using both experiments and simulations. The experimental setup is...


RF capacitively coupled plasmas in N2-H2 mixtures

Mahjoub, A.; Gouveia, A.; Carrasco, N.; Pintassilgo, C. D.; Marques, L.; Ramos, Marta M. D.; Alves, L. L.; Cernogora, G.

Comunicação em Poster ; This paper studies the modifications induced in low-pressure radio-frequency capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The plasmas are studied using both experiments (electrical and optical emission spectroscopy measurements) and simulations (using a fluid+kinetic code). Results reveal that the electron density increases with the amou...


Experimental characterization of capacitively coupled radio-frequency discharge...

Gouveia, A.; Mahjoub, A.; Carrasco, N.; Marques, L.; Alves, L. L.; Cernogora, G.; Pintassilgo, C. D.

We have performed extensive measurements in capacitively coupled radio-frequency discharges, producing N2-CH4 plasmas for methane concentrations between 0% and 10%. These dusty plasmas are well characterized by monitoring the evolution, with the methane concentration, of the electron density, the self-bias voltage, the coupled power, and the spectral line intensity of a number of optical transitions. The plasma...


Influence of an addition of H2 in a N2 CCP discharge

Mahjoub, A.; Gouveia, A.; Carrasco, N.; Pintassilgo, C. D.; Marques, L.; Alves, L. L.; Cernogora, G.

Apresentação em poster ; The present work involves the study of Capacitively Coupled Plasmas (CCPs) produced at 13.56 MHz radio-frequency (RF) and 0.2 to 1.2 mbar pressures. The main characteristics of the CCP source, which is described with more detail in reference [1], are the following: (i) the discharge is confined laterally by a grounded cylindrical metallic grid; (ii) the gas is continuously injected int...


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