Experimental characterization of capacitively coupled radio-frequency discharge...

• Autor(es): Gouveia, A. ; Mahjoub, A. ; Carrasco, N. ; Marques, L. ; Alves, L. L. ; Cernogora, G. ; Pintassilgo, C. D.
• Data: 2012
• Identificador Persistente: http://hdl.handle.net/1822/20164
• Origem: RepositóriUM - Universidade do Minho
• Tipo de Documento: Documento de conferência
• Idioma: Inglês

Descrição

We have performed extensive measurements in capacitively coupled radio-frequency discharges, producing N2-CH4 plasmas for methane concentrations between 0% and 10%. These dusty plasmas are well characterized by monitoring the evolution, with the methane concentration, of the electron density, the self-bias voltage, the coupled power, and the spectral line intensity of a number of optical transitions. The plasma properties exhibit drastic changes that are found correlated with the dust production regime.