RF capacitively coupled plasmas in N2-H2 mixtures

• Autor(es): Mahjoub, A. ; Gouveia, A. ; Carrasco, N. ; Pintassilgo, C. D. ; Marques, L. ; Ramos, Marta M. D. ; Alves, L. L. ; Cernogora, G.
• Data: 2012
• Identificador Persistente: http://hdl.handle.net/1822/20138
• Origem: RepositóriUM - Universidade do Minho
• Tipo de Documento: Documento de conferência
• Idioma: Inglês

Descrição

Comunicação em Poster This paper studies the modifications induced in low-pressure radio-frequency capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The plasmas are studied using both experiments (electrical and optical emission spectroscopy measurements) and simulations (using a fluid+kinetic code). Results reveal that the electron density increases with the amount of injected H2, at constant coupled power.