Structural and photoluminescence studies of erbium implanted nanocrystalline si...

• Author(s): Cerqueira, M. F. ; Alpuim, P. ; Filonovich, Sergey ; Alves, E. ; Rolo, Anabela G. ; Andrês, G. ; Soares, J. ; Kozanecki, A.
• Date: 2009
• Persistent ID: http://hdl.handle.net/1822/13767
• Origin: RepositóriUM - Universidade do Minho
• Subject(s): Nanocrystalline silicon thin films; RFCVD; HWCVD; Structural properties; Er emission
• Document Type: Article
• Language: English

Description

Hydrogenated amorphous and nanocrystalline silicon thin films deposited by Hot Wire (HW) and Radio-Frequency Plasma-Enhanced (RF) Chemical Vapor Deposition were Er-bium-implanted. Their pre-implantation structural properties and post-implantation optical properties were studied and cor-related. After one-hour annealing at 150ºC in nitrogen atmos-phere only amorphous films showed photoluminescence (PL) activity at 1.54 μm, measured at 5 K. After further annealing at 300oC for one hour, all the samples exhibited a sharp PL peak positioned at 1.54 m, with a FWHM of ~5 nm. Amorphous films deposited by HW originated a stronger PL peak than corresponding films deposited by RF, while in na-nocrystalline films PL emission was much stronger in sam-ples deposited by RF than by HW. There was no noticeable difference in Er3+ PL activity be-tween films implanted with 1x1014 atoms/cm2 and 5x1015 at-oms/cm2 Er doses.