On-chip integrated CMOS optical microspectrometer with light-to-frequency conve...

• Author(s): Graaf, G. de ; Correia, J. H. ; Bartek, M. ; Wolffenbuttel, R. F.
• Date: 1999
• Persistent ID: http://hdl.handle.net/1822/4267
• Origin: RepositóriUM - Universidade do Minho
• Subject(s): Microspectrometer; Bus interface; Light-to-frequency converter
• Document Type: Article
• Language: English

Description

This paper describes a single-chip CMOS microspectrometer. Fixed-cavity Fabry-Perot etalons have been used, which feature an optical quality and long-term stability much higher than tuneable devices [1][2]. Many detectors are needed to cover a large optical spectral range with high resolution. Therefore, a single- chip microspectrometer has been realized, containing an array of 16 addressable Fabry-Perot etalons, photodetectors and circuits for read-out, multiplexing and driving a sensor bus. This resulted in a chip that can operate using only five external connections (including Vdd and Vss) covering the optical range of 400-500 nm with FWHM=18nm. Frequency output and serial bus interface allow easy multi-sensor, multi-chip interfacing using a microcontroller.