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A single-chip CMOS optical microspectrometer with light-to-frequency converter ...
Correia, J. H.; Graaf, G. de; Bartek, M.; Wolffenbuttel, R. F.A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot etalons (each one with a different resonance cavity length), photodetectors, and circuits for readout, multiplexing, and driving a serial bus interface has been fabricated in a standard 1.6 um CMOS technology (chiparea 3.9x4.2 mm2). The result is a chip that can operate using only four external connections (including ...
A CMOS optical microspectrometer with light-to-frequency converter, bus interfa...
Correia, J. H.; Graaf, G. de; Bartek, M.; Wolffenbuttel, R. F.A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot (F–P) etalons (each one with different resonance cavity length), photodetectors, and circuits for readout, multiplexing, and driving a serial bus interface has been fabricated in a standard 1.6- m CMOS technology (chip area 3 9 4 2 mm2). The result is a chip that can operate using only four external connections (inclu...
Single-chip CMOS optical microspectrometer
Correia, J. H.; Graaf, G. de; Kong, S. H.; Bartek, M.; Wolffenbuttel, R. F.Numerous applications, e.g., systems for chemical analysis by optical absorption and emission line characterization, will benefit from the availability of low-cost single-chip spectrometers. A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot etalons (each one with different resonance cavity length), photodetectors and circuits for read-out, multiplexing and driving a ...
On-chip integrated CMOS optical spectrometer with a light-to-frequency converte...
Graaf, G. de; Correia, J. H.; Bartek, M.; Wolffenbuttel, R. F.A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry-Perot etalons (each one with different resonance cavity length), photodetectors and circuits for readout, multiplexing and driving a serial bus interface has been fabricated in a standard 1.6 mm CMOS technology (chip area 3.9x4.2 mm2). The result is a chip that can operate using only four external connections (including Vdd...
Optical microspectrometer using a micro-instrumentation platform
Bartek, M.; Correia, J. H.; Graaf, G. de; Wolffenbuttel, R. F.MEMS are usually designed for measuring one parameter and on-chip co-integration of sensor (microstructure) and readout circuits is often pursued. In a multi-parameter measurement system, yield considerations and fabrication compatibility problems favor micro-instruments based on active Si-MCM techniques. The generic device is based on a stacked structure with a universally applicable active silicon MCM platfor...
Single-chip CMOS optical microspectrometer with sensor bus interface
Correia, J. H.; Graaf, G. de; Kong, S. H.; Bartek, M.; Wolffenbuttel, R. F.A single-chip CMOS microspectrometer containing an array of 16 addressable fixed-cavity Fabry-Perot etalons, photodetectors and circuits for read-out, multiplexing and driving the ISS sensor bus has been fabricated. This resulted in a chip that can operate using only five external connections (including Vdd and Vss) covering the optical range of 400-500 nm with FWHM=18nm. Frequency output and serial bus interfa...
On-chip integrated CMOS optical microspectrometer with light-to-frequency conve...
Graaf, G. de; Correia, J. H.; Bartek, M.; Wolffenbuttel, R. F.This paper describes a single-chip CMOS microspectrometer. Fixed-cavity Fabry-Perot etalons have been used, which feature an optical quality and long-term stability much higher than tuneable devices [1][2]. Many detectors are needed to cover a large optical spectral range with high resolution. Therefore, a single- chip microspectrometer has been realized, containing an array of 16 addressable Fabry-Perot etalon...
CMOS compatible optical sensors with thin film interference filters : fabricati...
Kong, S. H.; Correia, J. H.; Graaf, G. de; Bartek, M.; Wolffenbuttel, R. F.Optical microsystems with high spectral selectivity and fabrication compatible with a standard CMOS process have been realized. PN junction photodiodes are used for photodetection. A multi-layer optical filter fabricated on top of the active photodiode forms a Fabry-Perot optical resonance cavity. The resonance wavelength can be designed within the entire visible spectrum. The filters are fabricated by depositi...
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