On-chip integrated CMOS optical microspectrometer with light-to-frequency conve...

• Autor(es): Graaf, G. de ; Correia, J. H. ; Bartek, M. ; Wolffenbuttel, R. F.
• Data: 1999
• Identificador Persistente: http://hdl.handle.net/1822/4267
• Origem: RepositóriUM - Universidade do Minho
• Assunto(s): Microspectrometer; Bus interface; Light-to-frequency converter
• Tipo de Documento: Artigo
• Idioma: Inglês

Descrição

This paper describes a single-chip CMOS microspectrometer. Fixed-cavity Fabry-Perot etalons have been used, which feature an optical quality and long-term stability much higher than tuneable devices [1][2]. Many detectors are needed to cover a large optical spectral range with high resolution. Therefore, a single- chip microspectrometer has been realized, containing an array of 16 addressable Fabry-Perot etalons, photodetectors and circuits for read-out, multiplexing and driving a sensor bus. This resulted in a chip that can operate using only five external connections (including Vdd and Vss) covering the optical range of 400-500 nm with FWHM=18nm. Frequency output and serial bus interface allow easy multi-sensor, multi-chip interfacing using a microcontroller.