Efficiency improvement of a chip-size antenna for wireless microsystems

• Author(s): Mendes, P. M. ; Durães, Dalila ; Bartek, M. ; Correia, J. H.
• Date: 2003
• Persistent ID: http://hdl.handle.net/1822/1560
• Origin: RepositóriUM - Universidade do Minho
• Subject(s): Chip-size antenna; Bulk-micromachining technology
• Document Type: Conference Object
• Language: English

Description

This work reports on the use of bulk-micromachining technology to increase the efficiency of a folded shorted-patch antenna. This antenna was designed on two stacked wafers (glass bonded on high-resistivity silicon). The analysis was carried out using the HFSS FEM tool. It was shown that bulk-micromachining technology could be used together with HRS to increase the antenna efficiency by ~20 %. Also, it can be used to allow the use of low-resistivity silicon for antenna substrate. Furthermore, bulk-micromachining technology can be used as an option to tune or to select the antenna operating frequency.