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Efficiency improvement of a chip-size antenna for wireless microsystems
Mendes, P. M.; Durães, Dalila; Bartek, M.; Correia, J. H.This work reports on the use of bulk-micromachining technology to increase the efficiency of a folded shorted-patch antenna. This antenna was designed on two stacked wafers (glass bonded on high-resistivity silicon). The analysis was carried out using the HFSS FEM tool. It was shown that bulk-micromachining technology could be used together with HRS to increase the antenna efficiency by ~20 %. Also, it can be u...
Spiral inductors on silicon for wireless communications
Trabulo, Pedro; Durães, Dalila; Mendes, P. M.; Garrido, Paulo; Correia, J. H.This paper presents the design and fabrication of integrated micromachined inductors on silicon substrates. In order to reduce eddy currents in silicon substrates, bulk-micromachining technology is used to etch the silicon wafer. In this way, aluminum spiral micromachined inductors can achieve a quality factor Q of approximately 30 (0.6-2 nH @ 2-15 GHz). Also, the resistivity of the inductors material is discus...
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