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Piezoresistive silicon thin film sensor array for biomedical applications
Alpuim, P.; Correia, Vítor; Marins, Emílio Sérgio; Rocha, J. G.; Trindade, Isabel; Lanceros-Méndez, S.N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor −28, were deposited on rugged and flexible polyimide foils by Hot-wire chemical vapor deposition using a tantalum filament heated to 1750 °C. The piezoresistive response under cyclic quasi-static and dynamical (up to 100 Hz) load conditions is reported. Test structures, consisting of microresistors having lateral dimensions ...
Data: 2011
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Origem: RepositóriUM - Universidade do Minho
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