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Effect of thermal treatments on the structure of MoNxOy thin films
Cunha, L.; Rebouta, L.; Vaz, F.; Staszuk, M.; Malara, S.; Barbosa, José Gusman; Carvalho, P.; Alves, E.; Le Bourhis, E.; Goudeau, Ph.; Rivière, J. P.Article in Press ; MoNxOy films were deposited on steel substrates by dc reactive magnetron sputtering. The depositions were carried out from a pure molybdenum target, varying the flow rate of reactive gases. X-ray diffraction (XRD) results revealed the occurrence of cubic MoNx and hexagonal (d-MoN) phases for the films with high nitrogen flow rates. The increase of oxygen content induces the decrease of the g...
Data: 2008
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Origem: RepositóriUM - Universidade do Minho
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