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Modeling of capacitively coupled radio-frequency discharges in N2-H2 mixtures

Apresentação em poster ; Capacitively coupled radio-frequency (ccrf) discharges in N2-H2 mixtures are becoming increasingly popular. Discharges operated in mixtures of hydrogen and nitrogen are nowadays used as a source of active species for various kinds of applications from etching of low-k materials to modifications of polymer surfaces for biomedical applications. Moreover, these discharges are also being u...