In this work, the lack of adhesion occurred during the up-scaling of the deposition of tribological coatings in a semi-industrial apparatus is interpreted. The adhesion problems were detected for both hard and self-lubricant coatings from W-Ti-N and W:C systems, respectively, when they were deposited in a 4 cathodes TEER® chamber by reactive unbalanced magnetron sputtering. In spite of cleaning the substrates s...
http://www.sciencedirect.com/science/article/B6W6W-4VCH71Y-1/2/9b50f04850d12009018cd55f8983a391
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