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Physical and morphological characterization of reactively magnetron sputtered T...
Vaz, F.; Machado, P.; Rebouta, L.; Mendes, J. A.; Lanceros-Méndez, S.; Cunha, L.; Nascimento, Sérgio M. C.; Goudeau, Ph.; Rivière, J. P.; Alves, E.The present paper reports the influence of growth conditions on the properties of TiN thin films deposited by rf reactive magnetron sputtering in the low-pressure range. The effects of rf power at the Ti target and the negative bias voltage at the substrate in the morphology, structure, electrical resistivity and colour of the samples were studied in detail. X-Ray diffraction results showed that the delta-TiN p...
Data: 2002
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Origem: RepositóriUM - Universidade do Minho
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