Estágio realizado na Qimonda e orientado pelo Eng.º Rui Batista e Doutora Isabel Barros ; Tese de mestrado integrado. Engenharia Metalúrgica e de Materiais. Faculdade de Engenharia. Universidade do Porto. 2008
Ti–Si–C–ON films were deposited by DC reactive magnetron sputtering using different partial pressure of oxygen (pO2) and nitrogen (pN2) ratio. Compositional analysis revealed the existence of two different growth zones for the films; one zone deposited under low pO2/pN2 and another zone deposited under high pO2/pN2. The films produced under low pO2/pN2 were deposited at a lower rate and presented a fcc structur...
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