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Effect of grain size and hydrogen passivation on the electrical properties of n...
Cerqueira, M. F.; Semikina, T. V.; Baidus, N. V.; Alves, E.The properties of mixed-phase (nanocrystalline/amorphous) silicon layers produced by reactive RF-sputtering are described. The chemical composition and nanostructure [i.e. nanocrystal (NC) size and volume fraction] of the films were studied by Rutherford backscattering spectroscopy (RBS) and micro-Raman spectroscopy, respectively. Samples with different fractions of the nanocrystalline phase and NC mean size we...
Data: 2010
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Origem: RepositóriUM - Universidade do Minho
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