The main purpose of this work consists in the preparation of titanium oxycarbide, TiCxOy, thin films, in which the presence of oxygen changed the film properties between those of titanium carbide and those of titanium oxide. Varying the oxide/carbide ratio allowed to tune the structure of the films between titanium oxide and carbide and consequently electronic, mechanical and optical properties of the films. Th...
The main purpose of this work consists in the preparation of single layered titanium oxycarbide, TiCxOy, thin films. The obtained results show that the evolution of the different elements concentration with the oxygen flow can be divided into 3 different regimes -- i) carbide, zone I, ii) transition, zone T, and iii) an oxide one, zone II. Structure characterization results showed that the films crystallize in ...
Financiadores do RCAAP | |||||||
![]() |
![]() |
![]() |
![]() |
![]() |
![]() |