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Structure and chemical bonds in reactively sputtered black Ti–C–N–O thin films
Chappé, J. M.; Marco de Lucas, M. C.; Cunha, L.; Moura, C.; Pierson, J. F.; Imhoff, L.; Heintz, O.; Potin, V.; Bourgeois, S.; Vaz, F.The evolution of the nanoscale structure and the chemical bonds formed in Ti–C–N–O films grown by reactive sputtering were studied as a function of the composition of the reactive atmosphere by increasing the partial pressure of an O2+N2 gas mixture from 0 up to 0.4 Pa, while that of acetylene (carbon source) was constant. The amorphisation of the films observed by transmission electron microscopy was confirmed...
Data: 2011
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Origem: RepositóriUM - Universidade do Minho
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