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Influence of nitrogen content on the structural, mechanical and electrical prop...
Vaz, F.; Ferreira, J. A.; Ribeiro, E.; Rebouta, L.; Lanceros-Méndez, S.; Mendes, J.; Alves, E.; Goudeau, Ph.; Rivière, J. P.; Ribeiro, António FernandoThis paper reports on the preparation of TiNx thin films by d.c. reactive magnetron sputtering. The coating thickness ranged from 1.7 to 4.2 Am and the nitrogen content varied between 0 and 55 at.%. X-Ray diffraction showed the development of the hexagonal a-Ti phase, with strong [002] orientation for low nitrogen contents, where the N atoms fit into octahedral sites in the Ti lattice as the amount of nitrogen ...
Effect of substrate bias voltage on amorphous Si–C–N films produced by PVD tech...
Cunha, L.; Moura, C.; Leme, J.; Andrês, G.; Pischow, K.SixCyNz thin films were deposited by reactive magnetron sputtering in glass and steel substrates. The films were grown in a rotation mode over a carbon and a silicon targets in a mixed Ar/N2 atmosphere. The substrates were held at a substrate temperature of 573 K. The argon flow was kept constant (100 sccm) and the nitrogen flow was 20 sccm or 25 sccm, in each one of the two series of produced films, resulting ...
Effect of nitrogen gas flow on amorphous Si–C–N films produced by PVD techniques
Moura, C.; Cunha, L.; Orfão, H.; Pischow, K.; De Rijk, J.; Rybinski, M.; Mrzyk, D.Si C N thin films were deposited by reactive magnetron sputtering on glass and steel substrates. The films were grown in a x y z rotation mode over a carbon and a silicon targets in a mixed Ar/N2 atmosphere at a substrate temperature of 300 °C. The 2 substrates were held grounded or at a negative bias of -25 and -50 V. The film characteristics were also controlled by nitrogen flow. Binary and ternary films were...
Performance of chromium nitride based coatings under plastic processing conditions
Cunha, L.; Andritschky, M.; Pischow, K.; Wang, Z.; Zarychta, A.; Miranda, A. S.; Cunha, A. M.Chromium nitride based coatings were produced in the form of monolithic and multilayer coatings, by DC and RF reactive magnetron sputtering. These coatings were deposited onto stainless steel and tool steel substrates. Chromium nitride coatings have;proved to be wear and corrosion resistant. The combination of these characteristics was necessary to protect surfaces during plastic processing. In order to select ...
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