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Influence of composition, bonding characteristics and microstructure on the ele...
Borges, Joel; Fonseca, C.; Barradas, Nuno P.; Alves, Eduardo; Girardeau, Thierry; Paumier, Fabien; Vaz, F.; Marques, L.Thin films of AlOxNy were deposited by magnetron sputtering in a wide composition range. Different structures and morphologies were observed, depending on the composition and bonding states, which opened the possibility to tailor the properties of this oxynitride system between those of pure Al and those of nitride and oxide films. In a wide range of stoichiometries, one can report the formation of nanocomposit...
Electrical and optical properties of AlNxOy thin films deposited by reactive DC...
Borges, Joel; Martin, Nicolas; Barradas, Nuno; Alves, Eduardo; Eyidi, Dominique; Beaufort, Marie France; Girardeau, Thierry; Paumier, Fabien; Vaz, F.Resumo e poster ; Aluminium, Al, is a metallic material used in a large variety of technological fields, such as surface plasmon-coupled emission (SPCE) devices for biochemical applications and it is also a good candidate to be used as nonresonante plasmonic nanoparticle in thin-film silicon solar cells. Aluminium nitride, AlN, is a semiconductor material and it can be used in the fabrication of optical sensor...
Effects of annealing on the electrical and optical properties of AlNxOy thin films
Borges, Joel; Arvinte, R.; Barradas, Nuno; Alves, Eduardo; Camelio, Sophie; Girardeau, Thierry; Paumier, Fabien; Vaz, F.; Marques, L.Resumo e poster ; Aluminium oxynitride is known to be a ceramic material with high strength and hardness, resulting from a stabilization of alumina (Al2O3) with nitrogen, in a cubic spinel structure, at thermodynamic conditions very different from those found in low plasma temperature deposition processes. Beyond this stable phase of AlNxOy, the available knowledge on this system is still very reduced and the ...
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