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Room temperature paramagnetism of ZnO:Mn films grown by RF-sputtering

ZnO:Mn transparent thin films (thickness b1 μm) with the Mn contents ranging from 1.8 to 3.25 at.% were grown by RF magnetron co-sputtering. The films are nanocrystalline, with wurtzite-structure grains of a typical size of 20 nm and with a preferential orientation of the c-axis perpendicular to the surface. According to the Raman spectroscopy data, Mn mostly substitutes Zn in the lattice sites. In spite of the...