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Ti–Si–C thin films produced by magnetron sputtering : correlation between physi...
Cunha, L.; Vaz, F.; Moura, C.; Munteanu, D.; Ionescu, C.; Rivière, J. P.; Le Bourhis, E.Ti–Si–C thin films were deposited onto silicon, stainless steel and high-speed steel substrates by magnetron sputtering, using different chamber configurations. The composition of the produced films was obtained by Electron Probe Micro-Analysis (EPMA) and the structure by X-ray diffraction (XRD). The hardness and residual stresses were obtained by depth-sensing indentation and substrate deflection measurements ...
ZrOxNy decorative thin films prepared by the reactive gas pulsing process
Carvalho, P.; Cunha, L.; Alves, E.; Martin, N.; Le Bourhis, E.; Vaz, F.Zirconium oxynitride thin films were deposited by dc reactive magnetron sputtering. A zirconium metallic target was sputtered in an Ar + N2 + O2 atmosphere. Argon and nitrogen flow rates were maintained constant whereas oxygen was pulsed during the deposition, implementing the reactive gas pulsing process (RGPP). A constant pulsing period T = 3 s was used following an exponential periodic signal versus time. Th...
Effect of thermal treatments on the structure of MoNxOy thin films
Cunha, L.; Rebouta, L.; Vaz, F.; Staszuk, M.; Malara, S.; Barbosa, José Gusman; Carvalho, P.; Alves, E.; Le Bourhis, E.; Goudeau, Ph.; Rivière, J. P.Article in Press ; MoNxOy films were deposited on steel substrates by dc reactive magnetron sputtering. The depositions were carried out from a pure molybdenum target, varying the flow rate of reactive gases. X-ray diffraction (XRD) results revealed the occurrence of cubic MoNx and hexagonal (d-MoN) phases for the films with high nitrogen flow rates. The increase of oxygen content induces the decrease of the g...
Properties of MoNxOy thin films as a function of N/O ratio
Barbosa, José Gusman; Cunha, L.; Rebouta, L.; Moura, C.; Vaz, F.; Carvalho, S.; Alves, E.; Le Bourhis, E.; Goudeau, Ph.; Rivière, J. P.The main purpose of this work consists on the preparation of single layered molybdenum oxynitride, MoNxOy. The films were deposited on steel substrates by dc reactive magnetron sputtering. The depositions were carried out from a pure Mo target varying the flow rate of reactive gases, which allowed tune the crystallographic structure between insulating oxides and metallic nitrides and consequently electronic, me...
Optimization and thermal stability of TiAlN-Mo multilayers
Tavares, C. J.; Vidrago, C.; Rebouta, L.; Le Bourhis, E.; Rivière, J. P.; Denanot, M. F.In this work we focus on the optimization and thermal stability of nanocomposite TiAlN/Mo multilayers that were produced by reactive magnetron sputtering on high-speed steel substrates, with modulation periods below 5 nm. These multilayers were annealed between 600– 900 ºC for 1 h in a vacuum furnace. Preliminary X-ray diffraction results reveal that these coatings are very stable up to 900 ºC, since the multil...
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