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Integrated silicon microspectrometers
Kong, S. H.; Correia, J. H.; Bartek, M.; Wolffenbuttel, R. F.Microspectrometers, which read color and the results from analytical chemistry, are used for quality inspection in industry and agiculture. They read the chromatography results by measuring the infrared (IR) absorption of the chemical constituent between the IR source and the grating. Micromachining can implement the dispersion and detection elements in a silicon microspectrometer so that it can analyze the spe...
Single-chip CMOS optical microspectrometer
Correia, J. H.; Graaf, G. de; Kong, S. H.; Bartek, M.; Wolffenbuttel, R. F.Numerous applications, e.g., systems for chemical analysis by optical absorption and emission line characterization, will benefit from the availability of low-cost single-chip spectrometers. A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot etalons (each one with different resonance cavity length), photodetectors and circuits for read-out, multiplexing and driving a ...
Stray-light compensation in thin-film Fabry-Perot optical filters : application...
Bartek, M.; Correia, J. H.; Kong, S. H.; Wolffenbuttel, R. F.This paper describes a method for significantly improving the performance of integrated Fabry- Perot- based optical spectral analysers, in terms of spectral selectivity and/or requirements on the input light beam conditioning. The method is based on compensation of the stray-light components induced by the non-idealities of both the incident light beam and a Fabry-Perot (F-P) resonator. The compensation structu...
Single-chip CMOS optical microspectrometer with sensor bus interface
Correia, J. H.; Graaf, G. de; Kong, S. H.; Bartek, M.; Wolffenbuttel, R. F.A single-chip CMOS microspectrometer containing an array of 16 addressable fixed-cavity Fabry-Perot etalons, photodetectors and circuits for read-out, multiplexing and driving the ISS sensor bus has been fabricated. This resulted in a chip that can operate using only five external connections (including Vdd and Vss) covering the optical range of 400-500 nm with FWHM=18nm. Frequency output and serial bus interfa...
CMOS compatible optical sensors with thin film interference filters : fabricati...
Kong, S. H.; Correia, J. H.; Graaf, G. de; Bartek, M.; Wolffenbuttel, R. F.Optical microsystems with high spectral selectivity and fabrication compatible with a standard CMOS process have been realized. PN junction photodiodes are used for photodetection. A multi-layer optical filter fabricated on top of the active photodiode forms a Fabry-Perot optical resonance cavity. The resonance wavelength can be designed within the entire visible spectrum. The filters are fabricated by depositi...
Microinstrumentation system in silicon for industrial applications
Correia, J. H.; Cretu, E.; Kong, S. H.; Brünner, M. P.; Bartek, M.; Wolffenbuttel, R. F.Comunicação apresentada no Workshop in SensorTechnologie, Zeist, The Netherlands, 12-13 March 1997. ; A microinstrumentation system in silicon is composed of a platform chip providing infrastructural functions, such as a local bus for data exchange, power management and several mounting sites for smart sensors and a microcontroller.
Flexible architecture for microinstrumentation systems in silicon
Cretu, E.; Correia, J. H.; Kong, S. H.; Bartek, M.; Wolffenbuttel, R. F.A flexible architecture for a microinstru- mentation system in silicon was developped, and intended for use in a wide range of applications. The MCM device should be considered a genuine (micro)instrument, which supplies high-level data over an external instrumentation bus. Internally, the system should support all vital functions, such as power management, self-calibration and in-system data transfer over a fl...
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