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Sol-Gel (BaxSr1-x)TiO3 thin films for microelectronic applications
Jie GaoDielectric, piezoelectric and ferroelectric thin films have been in the past years significantly studied because of their technological interest in a wide range of applications in the microelectronics industry. Among the several ferroelectric materials, compositions within the solid solution between the ferroelectric BaTiO3 and the quantum paraelectric SrTiO3 (Ba1-xSrx)TiO3 (BST), possess high dielectric consta...
Data: 2007
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Origem: RIA - Repositório Institucional da Universidade de Aveiro
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