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Structural and mechanical properties of Ti–Si–C–ON for biomedical applications
Guimarães, Freddy; Oliveira, Cristina; Sequeiros, Elsa; Torres, Marta; Susano, M.; Henriques, Mariana; Oliveira, Rosário; Escobar Galindo, R.Ti–Si–C–ON films were deposited by DC reactive magnetron sputtering using different partial pressure of oxygen (pO2) and nitrogen (pN2) ratio. Compositional analysis revealed the existence of two different growth zones for the films; one zone deposited under low pO2/pN2 and another zone deposited under high pO2/pN2. The films produced under low pO2/pN2 were deposited at a lower rate and presented a fcc structur...
Data: 2008
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Origem: RepositóriUM - Universidade do Minho
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