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Effect of thermal treatments on the structure of MoNxOy thin films
Cunha, L.; Rebouta, L.; Vaz, F.; Staszuk, M.; Malara, S.; Barbosa, José Gusman; Carvalho, P.; Alves, E.; Le Bourhis, E.; Goudeau, Ph.; Rivière, J. P.Article in Press ; MoNxOy films were deposited on steel substrates by dc reactive magnetron sputtering. The depositions were carried out from a pure molybdenum target, varying the flow rate of reactive gases. X-ray diffraction (XRD) results revealed the occurrence of cubic MoNx and hexagonal (d-MoN) phases for the films with high nitrogen flow rates. The increase of oxygen content induces the decrease of the g...
The influence of structure changes in the properties of TiCxOy decorative thin ...
Fernandes, A. C.; Vaz, F.; Cunha, L.; Parreira, N. M. G.; Cavaleiro, A.; Goudeau, Ph.; Bourhis, E. Le; Rivière, J. P.; Munteanu, D.; Borcea, B.The main purpose of this work consists in the preparation of titanium oxycarbide, TiCxOy, thin films, in which the presence of oxygen changed the film properties between those of titanium carbide and those of titanium oxide. Varying the oxide/carbide ratio allowed to tune the structure of the films between titanium oxide and carbide and consequently electronic, mechanical and optical properties of the films. Th...
Influence of the O/C ratio in the behaviour of TiCxOy thin films
Fernandes, A. C.; Vaz, F.; Rebouta, L.; Pinto, A.; Alves, E.; Parreira, N. M. G.; Goudeau, Ph.; Bourhis, E. Le; Rivière, J. P.The main purpose of this work consists in the preparation of single layered titanium oxycarbide, TiCxOy, thin films. The obtained results show that the evolution of the different elements concentration with the oxygen flow can be divided into 3 different regimes -- i) carbide, zone I, ii) transition, zone T, and iii) an oxide one, zone II. Structure characterization results showed that the films crystallize in ...
Structural evolution in ZrNxOy thin films as a function of temperature
Cunha, L.; Vaz, F.; Moura, C.; Rebouta, L.; Carvalho, P.; Alves, E.; Cavaleiro, A.; Goudeau, Ph.; Rivière, J. P.Single-layered zirconium oxynitride (ZrNxOy) thin films have been deposited on steel substrates, at a constant temperature of 300 °C, by radiofrequency (rf) reactive magnetron sputtering of a pure Zr target in an argon-oxygen-nitrogen atmosphere. The variation of the flow rate of the reactive gases enabled changes in the composition and structure of the films. X-ray diffraction (XRD) and glancing incidence X-ra...
Properties of MoNxOy thin films as a function of N/O ratio
Barbosa, José Gusman; Cunha, L.; Rebouta, L.; Moura, C.; Vaz, F.; Carvalho, S.; Alves, E.; Le Bourhis, E.; Goudeau, Ph.; Rivière, J. P.The main purpose of this work consists on the preparation of single layered molybdenum oxynitride, MoNxOy. The films were deposited on steel substrates by dc reactive magnetron sputtering. The depositions were carried out from a pure Mo target varying the flow rate of reactive gases, which allowed tune the crystallographic structure between insulating oxides and metallic nitrides and consequently electronic, me...
Structural stability of decorative ZrNxOy thin films
Carvalho, P.; Vaz, F.; Rebouta, L.; Carvalho, S.; Cunha, L.; Goudeau, Ph.; Rivière, J. P.; Alves, E.; Cavaleiro, A.ZrNxOy thin films were prepared by rf reactive magnetron sputtering. The thermal stability of the coatings was tested in vacuum for an annealing time of 1 h in the temperature range 400-800 °C. Residual stresses originated by the deposition process were partially or almost completely released with the annealing, which is consistent with the X-ray diffraction results. Samples with low oxygen fraction (0.10 < ...
Influence of nitrogen content on the structural, mechanical and electrical prop...
Vaz, F.; Ferreira, J. A.; Ribeiro, E.; Rebouta, L.; Lanceros-Méndez, S.; Mendes, J.; Alves, E.; Goudeau, Ph.; Rivière, J. P.; Ribeiro, António FernandoThis paper reports on the preparation of TiNx thin films by d.c. reactive magnetron sputtering. The coating thickness ranged from 1.7 to 4.2 Am and the nitrogen content varied between 0 and 55 at.%. X-Ray diffraction showed the development of the hexagonal a-Ti phase, with strong [002] orientation for low nitrogen contents, where the N atoms fit into octahedral sites in the Ti lattice as the amount of nitrogen ...
Tribocorrosion behaviour of zrNxOy thin films for decorative applications
Ferreira, S. C.; Ariza, E.; Rocha, L. A.; Vaz, F.; Cunha, L.; Carvalho, P.; Rebouta, L.; Alves, E.; Goudeau, Ph.; Rivière, J. P.The main aim of this work is the investigation of the tribocorrosion behaviour of single layered zirconium oxynitride, ZrNxOy, thin films in alternative linear regime of sliding and immersed in an artificial sweat solution at room temperature. The films were produced by rf reactive magnetron sputtering, using a pure Zr target at a constant temperature of 300º C. Two different sets of samples were produced. In t...
Property change in ZrNxOy thin films: effect of the oxygen fraction and bias vo...
Vaz, F.; Carvalho, P.; Cunha, L.; Rebouta, L.; Moura, C.; Alves, E.; Ramos, A. R.; Cavaleiro, A.; Goudeau, Ph.; Rivière, J. P.The main purpose of this work consists on the preparation of single layered zirconium oxynitride, ZrNxOy, thin films, deposited by rf reactive magnetron sputtering. The depositions were carried out by varying the process parameters such as substrate bias voltage and flow rate of the reactive gases. Independently of O content, the samples prepared with oxygen fractions revealed crystalline structures basically c...
Atomic environment and interfacial structural order of TiAlN/Mo multilayers
Tavares, C. J.; Rebouta, L.; Rivière, J. P.; Girardeau, T.; Goudeau, Ph.; Alves, E.; Barradas, N. P.Multilayered TiAlN/Mo coatings were deposited by dc reactive magnetron sputtering in a custom-made chamber. In order to assess the composition of these coatings, a combined study of Extended X-ray Absorption Fine Structure (EXAFS) and Rutherford Backscattering Spectrometry (RBS) experiments were performed. Through the simulation of the EXAFS spectra, giving the local environment of the titanium atoms inside the...
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