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Study on excimer laser irradiation for controlled dehydrogenation and crystalli...
Gontad, F.; Filonovich, Sergey; Cerqueira, M. F.; Alpuim, P.; Chiussi, StefanoWe report on the excimer laser annealing (ELA) induced temperature gradients, allowing controlled crystal-lization and dehydrogenation of boron-doped a-Si:H/nc-Si:H multilayers. Depth of the dehydrogenation and crystallization process has been studied numerically and experimentally, showing that temperatures below the monohydride decomposition can be used and that significant changes of the doping profile can be ...
Data: 2013
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Origem: RepositóriUM - Universidade do Minho
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