Metallic (Me) oxynitrides (MeNxOy) are an attractive class of materials due to a unique set of versatile properties in different technological domains such as protective applications (wear, diffusion and corrosion-resistance), decorative coatings, gas barriers, microelectronics, optoelectronics, solar cells, etc. Among the group of oxynitrides, aluminium oxynitride (AlNxOy) presents some interesting characteris...
Multilayered TiAlN/Mo coatings were deposited by dc reactive magnetron sputtering in a custom-made chamber. In order to assess the composition of these coatings, a combined study of Extended X-ray Absorption Fine Structure (EXAFS) and Rutherford Backscattering Spectrometry (RBS) experiments were performed. Through the simulation of the EXAFS spectra, giving the local environment of the titanium atoms inside the...
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