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Characterisation of Ti1-xSixNy nanocomposite films
Vaz, F.; Rebouta, L.; Goudeau, P.; Pacaud, J.; Garem, H.; Rivière, J. P.; Cavaleiro, A.; Alves, E.Ti1-xSixNy films were synthesised by RF reactive sputtering from Ti and Si elemental targets, in an Ar/N2 gas mixture. XRD results revealed the development of a two-phase system, composed of a nanocrystalline f.c.c. TiN (phase 1: B1 NaCl type) and a second one (phase 2), where Si atoms replaced some of the Ti ones, inducing a structure that we may call a solid solution. An amorphous phase, supposed to be of sil...
Data: 2000
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Origem: Estudo Geral - Universidade de Coimbra
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