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Study of indium tin oxide thin films deposited on acrylics substrates by Ion be...

Meng Lijian; Liang Erjun; Gao Jinsong; Teixeira, Vasco M. P.; Santos, M. P. dos

Indium tin oxide (ITO) thin films have been deposited onto acrylics (PMMA) substrates by ion beam assisted deposition technique at different oxygen flows. The structural, optical and electrical properties of the deposited films have been characterized by X-ray diffraction, transmittance, FTIR, ellipometry and Hall effect measurements. The optical constants of the deposited films have been calculated by fitting ...


Indium tin oxide thin films prepared by ion beam assisted deposition technique ...

Meng Lijian; Gao Jinsong; Teixeira, Vasco M. P.; Santos, M. P. dos

Indium tin oxide (ITO) films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique (IBAD) at different ion beam currents (80 mA – 120 mA). The effect of the ion beam current on films properties has been studied. The films prepared at low ion beam current (80 mA) show an almost amorphous structure. As the ion beam current is increased, films show a preferred orie...


Effect of the oxygen flow on the properties of ITO thin films deposited by ion ...

Meng Lijian; Gao Jinsong; Silva, R. A.; Song Shigeng

ITO films were deposited onto glass substrates by ion beam assisted deposition method. The oxygen ions were produced using a Kaufman ion source. The oxygen flow was varied from 20 until 60 sccm and the effect of the oxygen flow on properties of ITO films has been studied. The structural properties of the film were characterized by X-ray diffraction and atomic force microscopy. The optical properties were charac...


The effect of the ion beam energy on the properties of indium tin oxide thin fi...

Meng Lijian; Gao Jinsong; Santos, M. P. dos; Wang Xiaoyi; Wang Tongtong

Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films h...


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Fundação para a Ciência e a Tecnologia Universidade do Minho   Governo Português Ministério da Educação e Ciência Programa Operacional da Sociedade do Conhecimento União Europeia