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Influence of stoichiometry and structure on the optical properties of AlNxOy films

Borges, Joel; Barradas, N. P.; Alves, Eduardo; Beaufort, Marie France; Eyidi, Dominique; Vaz, F.; Marques, L.

The AlNxOy system offers the possibility to obtain a wide range of responses, by tailoring the properties between Al, AlN and Al2O3, opening a significant number of possible applications. The aim of this work is to correlate the optical properties of AlNxOy thin films with their composition and structural features, taking as reference the binary systems AlNx and AlOy. In the AlNx system, the increase of the nit...


Electrical and optical properties of AlNxOy thin films deposited by reactive DC...

Borges, Joel; Martin, Nicolas; Barradas, Nuno; Alves, Eduardo; Eyidi, Dominique; Beaufort, Marie France; Girardeau, Thierry; Paumier, Fabien; Vaz, F.

Resumo e poster ; Aluminium, Al, is a metallic material used in a large variety of technological fields, such as surface plasmon-coupled emission (SPCE) devices for biochemical applications and it is also a good candidate to be used as nonresonante plasmonic nanoparticle in thin-film silicon solar cells. Aluminium nitride, AlN, is a semiconductor material and it can be used in the fabrication of optical sensor...


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Fundação para a Ciência e a Tecnologia Universidade do Minho   Governo Português Ministério da Educação e Ciência Programa Operacional da Sociedade do Conhecimento União Europeia