Metallic (Me) oxynitrides (MeNxOy) are an attractive class of materials due to a unique set of versatile properties in different technological domains such as protective applications (wear, diffusion and corrosion-resistance), decorative coatings, gas barriers, microelectronics, optoelectronics, solar cells, etc. Among the group of oxynitrides, aluminium oxynitride (AlNxOy) presents some interesting characteris...
Direct current magnetron sputtering was used to produce AlNxOy thin films, using an aluminum target, argon and a mixture of N2+O2 (17:3) as reactive gases. The partial pressure of the reactive gas mixture was increased, maintaining the discharge current constant. Within the two identified regimes of the target (metallic and compound), four different tendencies for the deposition rate were found and a morphologi...
Three sets of nanocomposite films consisting of different atomic concentrations of Ag dispersed in a TiO2 dielectric matrix were deposited by DC reactive magnetron sputtering, and subjected to several thermal annealing experiments in vacuum, for temperatures ranging from 200 to 600 ºC. The main goal of the present study is to analyse the optical properties of the as-deposited and annealed films in order to clar...
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