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Comparison between bulk micromachined and CMOS x-ray detectors
Rocha, J. G.; Schabmueller, C. G. J.; Ramos, N. F.; Lanceros-Méndez, S.; Evans, A. G. R.; Wolffenbuttel, R. F.; Correia, J. H.This paper compares two x-ray detectors fabricated using two different technologies: one is based on a bulk micromachined silicon photodetector and the other is based on a standard CMOS photodetector. The working principle of the two detectors is similar: a scintillating layer of CsI:Tl is placed above the photodetector, so the x-rays are first converted into visible light (560nm) which is then converted into a...
Comparison between bulk micromachined and CMOS detectors for X-ray measurements
Rocha, J. G.; Schabmueller, C. G. J.; Ramos, N. F.; Lanceros-Méndez, S.; Moreira, M. V.; Evans, A. G. R.; Wolffenbuttel, R. F.; Correia, J. H.This paper compares two x-ray detectors fabricated using two different technologies: one is based on a bulk micromachined silicon photodetector and the other is based on a standard CMOS photodetector. The working principle of the two detectors is similar: a scintillating layer of CsI:Tl is placed above the photodetector, so the x-rays are first converted into visible light (560 nm) which is then converted into ...
X-ray detector based on a bulk micromachined photodiode combined with a scintil...
Rocha, J. G.; Schabmueller, C. G. J.; Ramos, N. F.; Lanceros-Méndez, S.; Costa, Manuel F. M.; Evans, A. G. R.; Wolffenbuttel, R. F.; Correia, J. H.This paper reports the design, fabrication, assembly and testing of a x-ray detector based on a bulk micromachined photodiode (BMMPD) with a cavity filled with a scintillating crystal. The x-ray photons that reach the detector are first converted to visible light by the scintillating crystal. The visible light is then detected by the BMMPD, producing an electric current with value proportional to the incident x...
Xray detector based on bulk micromachined photodiode
Rocha, J. G.; Schabmueller, C. G. J.; Ramos, N. F.; Lanceros-Méndez, S.; Evans, A. G. R.; Wolffenbuttel, R. F.; Correia, J. H.This paper reports the design, fabrication, assembly and testing of a xray detector based on a bulk micromachined photodiode (BMMPD) with a cavity filled with a scintillating crystal. The xray photons that reach the detector are first converted to visible light by the scintillating crystal. The visible light is then detected by the BMMPD, producing an electric current whose value is proportional to the incident...
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