Article in press ; Within the frame of this work, low temperature Ti–Si–C films were deposited on high-speed steel and stainless steel substrates by combined dc/rf magnetron co-sputtering. Composition analysis revealed the existence of two distinct regions: (i) a silicon doped sub-stoichiometric titanium carbide zone and (ii) a titanium rich zone. Structural analysis confirmed the different nature of the prepa...
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