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Structure and optical properties of ZnO:V thin films with different doping conc...
Wang Li-Wei; Meng Lijian; Teixeira, Vasco M. P.; Song Shigeng; Xu Zheng; Xu Xu-RongA series of ZnO thin films doped with various vanadium concentrations were prepared on glass substrates by direct current reactive magnetron sputtering. The results of the X-ray diffraction (XRD) show that the films with doping concentration less than 10 at.% have a wurtzite structure and grow mainly along the c-axis orientation. The residual stress, estimated by fitting the XRD diffraction peaks, increases wit...
Study of ZnO:V thin films prepared by dc reactive magnetron sputtering ad diffe...
Wang Li-wei; Meng Lijian; Teixeira, Vasco M. P.; Placido, F.; Huang Jinzhao; Xu ZhengVanadium doped ZnO films with the doping concentration of 0.8% were deposited onto glass substrates at different sputtering pressures by direct current (DC) reactive magnetron sputtering using a zinc target doped with vanadium. The effect of the sputtering pressures (5*10-3 - 3*10-2 mbar) on the structural properties of the deposited films have been studied by X-ray diffraction (XRD), scanning electron microsco...
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