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Effects of annealing on the electrical and optical properties of AlNxOy thin films
Borges, Joel; Arvinte, R.; Barradas, Nuno; Alves, Eduardo; Camelio, Sophie; Girardeau, Thierry; Paumier, Fabien; Vaz, F.; Marques, L.Resumo e poster ; Aluminium oxynitride is known to be a ceramic material with high strength and hardness, resulting from a stabilization of alumina (Al2O3) with nitrogen, in a cubic spinel structure, at thermodynamic conditions very different from those found in low plasma temperature deposition processes. Beyond this stable phase of AlNxOy, the available knowledge on this system is still very reduced and the ...
Data: 2012
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Origem: RepositóriUM - Universidade do Minho
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