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Properties of tantalum oxynitride thin films produced by magnetron sputtering: ...
Cristea, D.; Constantin, D.; Crisan, A.; Abreu, C. S.; Gomes, J. R.; Barradas, N. P.; Alves, E.; Moura, C.; Vaz, F.; Cunha, L.The main purpose of this work is to present and to interpret the change of structure and physical properties of tantalum oxynitride (TaNxOy) thin films, produced by dc reactive magnetron sputtering, by varying the processing parameters. A set of TaNxOy films was prepared by varying the reactive gases flow rate, using a N2/O2 gas mixture with a concentration ratio of 17:3. The different films, obtained by this p...
The role of composition, structure and morphology on the electrical, optical an...
Borges, Joel; Martin, N.; Barradas, N. P.; Alves, E.; Eyidi, D.; Girardeau, T.; Fonseca, C.; Vaz, F.; Marques, L.Metallic (Me) oxynitrides (MeNxOy) are an attractive class of materials due to a unique set of versatile properties in different technological domains such as protective applications (wear, diffusion and corrosion-resistance), decorative coatings, gas barriers, microelectronics, optoelectronics, solar cells, etc. Among the group of oxynitrides, aluminium oxynitride (AlNxOy) presents some interesting characteris...
Structural and optical studies of Au doped titanium oxide films
Alves, E.; Franco, N.; Barradas, N. P.; Nunes, B.; Lopes, J.; Cavaleiro, A.; Torrell, M.; Cunha, L.; Vaz, F.Thin films of TiO2 were doped with Au by ion implantation and in situ during the deposition. The films were grown by reactive magnetron sputtering and deposited in silicon and glass substrates at a temperature around 150 °C. The undoped films were implanted with Au fluences in the range of 5 × 1015 Au/cm2–1 × 1017 Au/cm2 with a energy of 150 keV. At a fluence of 5 × 1016 Au/cm2 the formation of Au nanoclusters ...
Controlling the properties of layered self-organized Ge clusters in silica matrix
Pinto, S. R. C.; Roldan, M. A.; Buljan, Maja; Bernstorff, S.; Chahboun, A.; Barradas, N. P.; Alves, E.; Molina, S. I.; Ramos, Marta M. D.Comunicação em poster no simposio M - More than Moore: Novel materials approaches for functionalized Silicon based Microelectronics ; Si and Ge nanocrystals (NCs) embedded in a dielectric matrix, such as SiO2, have attracted great interest for many relevant technological applications. There are many studies about Ge NCs embedded in single layer of SiO2 [1]. However, there are only a few published results about...
Influence of stoichiometry and structure on the optical properties of AlNxOy films
Borges, Joel; Barradas, N. P.; Alves, Eduardo; Beaufort, Marie France; Eyidi, Dominique; Vaz, F.; Marques, L.The AlNxOy system offers the possibility to obtain a wide range of responses, by tailoring the properties between Al, AlN and Al2O3, opening a significant number of possible applications. The aim of this work is to correlate the optical properties of AlNxOy thin films with their composition and structural features, taking as reference the binary systems AlNx and AlOy. In the AlNx system, the increase of the nit...
Electrical and optical properties of AlNxOy thin films prepared by reactive DC ...
Borges, Joel; Martin, N.; Alves, E.; Barradas, N. P.; Vaz, F.; Marques, L.Resumo e comunicação oral ; The addition of oxygen and nitrogen to a growing Al film can give rise to an oxynitride (AlNxOy) film with a wide range of different properties, that can be tailored between those of the pure Al and those of AlNx and AlOy, In this work, a set of films of AlNxOy and two sets of the binary systems, AlNx and AlOy, were produced using reactive DC magnetron sputtering. The discharge char...
Tuning of the surface plasmon resonance in TiO2/Au thin films grown by magnetro...
Torrell, M.; Kabir, R.; Cunha, L.; Vasilevskiy, Mikhail; Vaz, F.; Cavaleiro, A.; Alves, E.; Barradas, N. P.Nanocomposites consisting of a dielectric matrix, such as TiO2, with embedded noble metal nanoparticles (NPs) possess specific optical properties due to the surface plasmon resonance (SPR) effect, interesting for several applications. The aim of this work is to demonstrate that these properties are sensitive to the nanostructure of magnetron-sputtered TiO2/Au thin films, which can be tuned by annealing. We stud...
Structural and optical properties of Ag : TiO2 nanocomposite films prepared by ...
Adochite, R.; Torrell, M.; Cunha, L.; Alves, E.; Barradas, N. P.; Cavaleiro, A.; Rivière, J. P.; Eyidi, D.; Vaz, F.Three sets of nanocomposite films consisting of different atomic concentrations of Ag dispersed in a TiO2 dielectric matrix were deposited by DC reactive magnetron sputtering, and subjected to several thermal annealing experiments in vacuum, for temperatures ranging from 200 to 600 ºC. The main goal of the present study is to analyse the optical properties of the as-deposited and annealed films in order to clar...
Low-temperature fabrication of layered self organized ge clusters by RF-sputtering
Pinto, S. R. C.; Rolo, Anabela G.; Buljan, M.; Chahboun, A.; Bernstorff, S.; Barradas, N. P.; Alves, E.; Kashtiban, R. J.; Bangert, U.; Gomes, M. J. M.In this article, we present an investigation of (Ge + SiO2)/SiO2 multilayers deposited by magnetron sputtering and subsequently annealed at different temperatures. The structural properties were investigated by transmission electron microscopy, grazing incidence small angles X-ray scattering, Rutherford backscattering spectrometry, Raman, and X-ray photoelectron spectroscopies. We show a formation of self-assem...
Preparation and characterization of CrN Oy thin films : the effect of compos...
Arvinte, R.; Borges, Joel; Sousa, R. E.; Munteanu, Florentina-Daniela; Barradas, N. P.; Alves, E.; Vaz, F.; Marques, L.Metallic oxynitrides have attracted the attention of several researchers in the last decade due to their versatile properties. Through the addition of a small amount of oxygen into a transition metal nitride film, the material’s bonding states between ionic and covalent types can be tailored, thus opening a wide range of electrical, optical, mechanical and tribological responses. Among the o...
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