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Low-temperature fabrication of layered self organized ge clusters by RF-sputtering
Pinto, S. R. C.; Rolo, Anabela G.; Buljan, M.; Chahboun, A.; Bernstorff, S.; Barradas, N. P.; Alves, E.; Kashtiban, R. J.; Bangert, U.; Gomes, M. J. M.In this article, we present an investigation of (Ge + SiO2)/SiO2 multilayers deposited by magnetron sputtering and subsequently annealed at different temperatures. The structural properties were investigated by transmission electron microscopy, grazing incidence small angles X-ray scattering, Rutherford backscattering spectrometry, Raman, and X-ray photoelectron spectroscopies. We show a formation of self-assem...
Data: 2011
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Origem: RepositóriUM - Universidade do Minho
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