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Capacitively coupled radio-frequency N2 discharges at low pressures
Marques, L.; Alves, L. L.; Pintassilgo, C. D.; Carrasco, N.; Boufendi, L.; Cernogora, G.Capacitively coupled radio-frequency discharges (ccrf) in nitrogen mixtures are frequently used for the processing, modification and functionalization of different kinds of materials. Although nitrogen plasmas have been studied for many years, and despite their growing interest in applications, there is only partial knowledge about ccrf nitrogen plasmas. This paper uses experiments and modelling to study ccrf d...
Capacitively coupled radio-frequency discharges in nitrogen at low pressures
Alves, L. L.; Marques, L.; Pintassilgo, C. D.; Wattieaux, G.; Es-Sebbar, E. T.; Berndt, J.; Kovacevic, E.; Carrasco, N.; Boufendi, L.; Cernogora, G.This paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56MHz frequency, 0.1–1 mbar pressures and 2–30W coupled powers. Experiments performed on two similar (not twin) setups, existing in the LATMOS and the GREMI laboratories, include electrical and optical emission spectroscopy (OES) measurements. Electrical measurements give the rf-applie...
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure
Alves, L. L.; Marques, L.; Pintassilgo, C. D.; Wattieaux, G.; Berndt, J.; Boufendi, L.; Es-Sebbar, E. T.; Carrasco, N.; Cernogora, G.Apresentação em poster; publicado em: Bulletin of the American Physical Society. 56:15 (2011). ; This paper studies capacitively coupled radio-frequency discharges (13.56MHz frequency) in pure nitrogen, produced within the LATMOS and the GREMI cylindrical parallel-plate reactors, surrounded by a lateral grounded grid, at 2-30W coupled powers and 0.2-1 mbar pressures. Simulations use an hybrid code [1] that cou...
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure
Alves, L. L.; Marques, L.; Pintassilgo, C. D.; Wattieaux, G.; Berndt, J.; Boufendi, L.; Es-Sebbar, E. T.; Carrasco, N.; Cernogora, G.Apresentação em poster ; This paper studies ccrf discharges (at f=13.56 MHz frequency) in pure nitrogen, produced within cylindrical parallel-plate reactors similar to GEC reference cells [1] (associated with the GREMI and the LATMOS setups, the latter corresponding to the PAMPRE experiment [2]), at 100-300 V applied voltages and 0.1-1 mbar pressures. Under these conditions, the neutral gas is found close to r...
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