Encontrados 17 documentos, a visualizar página 1 de 2
Influence of composition, bonding characteristics and microstructure on the ele...
Borges, Joel; Fonseca, C.; Barradas, Nuno P.; Alves, Eduardo; Girardeau, Thierry; Paumier, Fabien; Vaz, F.; Marques, L.Thin films of AlOxNy were deposited by magnetron sputtering in a wide composition range. Different structures and morphologies were observed, depending on the composition and bonding states, which opened the possibility to tailor the properties of this oxynitride system between those of pure Al and those of nitride and oxide films. In a wide range of stoichiometries, one can report the formation of nanocomposit...
Otimização do processo de deposição de oxinitretos metálicos por pulverização r...
Borges, Joel Nuno PintoTese de doutoramento em Ciências (área de especialização em Física) ; O sistema ternário de oxinitreto de alumínio (AlNxOy) oferece a possibilidade de obter um gradiente de respostas, combinando as propriedades do Al, AlN e do Al2O3 no A evolução da taxa de deposição dos filmes foi também correlacionada com o aumento da pressão parcial de gás reativo e com as características da deposição, encontrando-se quatro...
The role of composition, structure and morphology on the electrical, optical an...
Borges, Joel; Martin, N.; Barradas, N. P.; Alves, E.; Eyidi, D.; Girardeau, T.; Fonseca, C.; Vaz, F.; Marques, L.Metallic (Me) oxynitrides (MeNxOy) are an attractive class of materials due to a unique set of versatile properties in different technological domains such as protective applications (wear, diffusion and corrosion-resistance), decorative coatings, gas barriers, microelectronics, optoelectronics, solar cells, etc. Among the group of oxynitrides, aluminium oxynitride (AlNxOy) presents some interesting characteris...
Properties of MeNxOy thin films prepared by reactive DC magnetron sputtering
Borges, Joel; Vaz, F.; Marques, L.Poster apresentado no E-MRS 2012 SPRING MEETING, Simposio U "Carbon- or Nitrogen-Containing Nanostructured Thin Films" ; The addition of small amount of nitrogen to a growing MeOy (Me = Metal) film originates a new class of materials with a wide range of different properties, where the optical, electrical and mechanical ones may be tailored between those of the pure oxide, MeOy, and oxynitride, MeNxOy, films,...
Electrical properties of AlNxOy thin films prepared by reactive magnetron sputt...
Borges, Joel; Martin, N.; Barradas, Nuno P.; Alves, E.; Eyidi, D.; Beaufort, Marie France; Riviere, J. P.; Vaz, F.; Marques, L.Direct current magnetron sputtering was used to produce AlNxOy thin films, using an aluminum target, argon and a mixture of N2+O2 (17:3) as reactive gases. The partial pressure of the reactive gas mixture was increased, maintaining the discharge current constant. Within the two identified regimes of the target (metallic and compound), four different tendencies for the deposition rate were found and a morphologi...
Influence of stoichiometry and structure on the optical properties of AlNxOy films
Borges, Joel; Barradas, N. P.; Alves, Eduardo; Beaufort, Marie France; Eyidi, Dominique; Vaz, F.; Marques, L.The AlNxOy system offers the possibility to obtain a wide range of responses, by tailoring the properties between Al, AlN and Al2O3, opening a significant number of possible applications. The aim of this work is to correlate the optical properties of AlNxOy thin films with their composition and structural features, taking as reference the binary systems AlNx and AlOy. In the AlNx system, the increase of the nit...
Electrical and optical properties of AlNxOy thin films prepared by reactive DC ...
Borges, Joel; Martin, N.; Alves, E.; Barradas, N. P.; Vaz, F.; Marques, L.Resumo e comunicação oral ; The addition of oxygen and nitrogen to a growing Al film can give rise to an oxynitride (AlNxOy) film with a wide range of different properties, that can be tailored between those of the pure Al and those of AlNx and AlOy, In this work, a set of films of AlNxOy and two sets of the binary systems, AlNx and AlOy, were produced using reactive DC magnetron sputtering. The discharge char...
Optical emission spectroscopy study of a DC magnetron discharge in Ar/(O2-N2)
Borges, Joel; Martin, Nicolas; Vaz, F.; Marques, L.Resumo e poster ; Metallic (Me) oxynitrides (MeNxOy) are attracting the attention of many researchers for the last two decades due to a unique set of versatile properties, resulting from the combination of those from the pure metals and those of the correspondent binary nitrides and oxides. Among the group of already studied oxynitrides, and due to the combination of aluminium and aluminium nitride and oxide, ...
Electrical and optical properties of AlNxOy thin films deposited by reactive DC...
Borges, Joel; Martin, Nicolas; Barradas, Nuno; Alves, Eduardo; Eyidi, Dominique; Beaufort, Marie France; Girardeau, Thierry; Paumier, Fabien; Vaz, F.Resumo e poster ; Aluminium, Al, is a metallic material used in a large variety of technological fields, such as surface plasmon-coupled emission (SPCE) devices for biochemical applications and it is also a good candidate to be used as nonresonante plasmonic nanoparticle in thin-film silicon solar cells. Aluminium nitride, AlN, is a semiconductor material and it can be used in the fabrication of optical sensor...
Effects of annealing on the electrical and optical properties of AlNxOy thin films
Borges, Joel; Arvinte, R.; Barradas, Nuno; Alves, Eduardo; Camelio, Sophie; Girardeau, Thierry; Paumier, Fabien; Vaz, F.; Marques, L.Resumo e poster ; Aluminium oxynitride is known to be a ceramic material with high strength and hardness, resulting from a stabilization of alumina (Al2O3) with nitrogen, in a cubic spinel structure, at thermodynamic conditions very different from those found in low plasma temperature deposition processes. Beyond this stable phase of AlNxOy, the available knowledge on this system is still very reduced and the ...
| Financiadores do RCAAP | |||||||
|
|
|
|
|
|
||