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Controlling the properties of layered self-organized Ge clusters in silica matrix

Pinto, S. R. C.; Roldan, M. A.; Buljan, Maja; Bernstorff, S.; Chahboun, A.; Barradas, N. P.; Alves, E.; Molina, S. I.; Ramos, Marta M. D.

Comunicação em poster no simposio M - More than Moore: Novel materials approaches for functionalized Silicon based Microelectronics ; Si and Ge nanocrystals (NCs) embedded in a dielectric matrix, such as SiO2, have attracted great interest for many relevant technological applications. There are many studies about Ge NCs embedded in single layer of SiO2 [1]. However, there are only a few published results about...


Low-temperature fabrication of layered self organized ge clusters by RF-sputtering

Pinto, S. R. C.; Rolo, Anabela G.; Buljan, M.; Chahboun, A.; Bernstorff, S.; Barradas, N. P.; Alves, E.; Kashtiban, R. J.; Bangert, U.; Gomes, M. J. M.

In this article, we present an investigation of (Ge + SiO2)/SiO2 multilayers deposited by magnetron sputtering and subsequently annealed at different temperatures. The structural properties were investigated by transmission electron microscopy, grazing incidence small angles X-ray scattering, Rutherford backscattering spectrometry, Raman, and X-ray photoelectron spectroscopies. We show a formation of self-assem...


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Fundação para a Ciência e a Tecnologia Universidade do Minho   Governo Português Ministério da Educação e Ciência Programa Operacional da Sociedade do Conhecimento União Europeia