Comunicação em poster no simposio M - More than Moore: Novel materials approaches for functionalized Silicon based Microelectronics ; Si and Ge nanocrystals (NCs) embedded in a dielectric matrix, such as SiO2, have attracted great interest for many relevant technological applications. There are many studies about Ge NCs embedded in single layer of SiO2 [1]. However, there are only a few published results about...
In this article, we present an investigation of (Ge + SiO2)/SiO2 multilayers deposited by magnetron sputtering and subsequently annealed at different temperatures. The structural properties were investigated by transmission electron microscopy, grazing incidence small angles X-ray scattering, Rutherford backscattering spectrometry, Raman, and X-ray photoelectron spectroscopies. We show a formation of self-assem...
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