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Effect of thermal treatments on the structure of MoNxOy thin films
Cunha, L.; Rebouta, L.; Vaz, F.; Staszuk, M.; Malara, S.; Barbosa, José Gusman; Carvalho, P.; Alves, E.; Le Bourhis, E.; Goudeau, Ph.; Rivière, J. P.Article in Press ; MoNxOy films were deposited on steel substrates by dc reactive magnetron sputtering. The depositions were carried out from a pure molybdenum target, varying the flow rate of reactive gases. X-ray diffraction (XRD) results revealed the occurrence of cubic MoNx and hexagonal (d-MoN) phases for the films with high nitrogen flow rates. The increase of oxygen content induces the decrease of the g...
Properties of MoNxOy thin films as a function of N/O ratio
Barbosa, José Gusman; Cunha, L.; Rebouta, L.; Moura, C.; Vaz, F.; Carvalho, S.; Alves, E.; Le Bourhis, E.; Goudeau, Ph.; Rivière, J. P.The main purpose of this work consists on the preparation of single layered molybdenum oxynitride, MoNxOy. The films were deposited on steel substrates by dc reactive magnetron sputtering. The depositions were carried out from a pure Mo target varying the flow rate of reactive gases, which allowed tune the crystallographic structure between insulating oxides and metallic nitrides and consequently electronic, me...
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